Hello Yilei,

I've had this problem, too. You could try heating your photoresist
stripper if it is designed for that. (For example, ACT II can be
heated.) If that doesn't work, I have found that piranha etch does a
good job of removing highly cross-linked photoresists (though I haven't
tried it on AZ5209). Of course, you cannot use piranha if your samples
have exposed metal layers.

Please be careful.

-Craig McGray


> Message: 2
> Date: Thu, 2 Oct 2003 17:00:31 -0500 (CDT)
> From: Yilei Zhang 
> Subject: [mems-talk] photoresist remove
> To: [email protected]
> Message-ID: <[email protected]>
>
> Dear Members:
> I have some samples with photoresist (AZ5209) coating for a long time,
> now i cannot remove it by aceton, stripper, or ultrasonic cleaner. Can
> anyone give me some  suggestions? Thanks.
>
> Regards,
> Yilei Zhang
>