Dear All,

I am a new-comer of MEMS area. I am suffering from KOH etching problem. My
outside convex edge has been etched to be round because I forget corner
compensation when I draw my design. I do not have any budget to order a new
mask. Is KOH+IPA will help me? What is the recipe? I am also confused what the
undercut compensation really meant in some literature.

Your help is highly apperciated.

Lydia



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