Dear all;
I want to make a mold as followed.
(please open following homepage address. There will be a picture.)
http://my.dreamwiz.com/kotai75/picture/Etching.JPG
The substrate is (100) Silicon wafer and Oxide will be used as a mask.
1. Oxide deposition.
2. Wet Etching (TMAH) for pyramid tip (111)
3. Deep RIE Etching.
So, I want to know these following process can make a mold like that?
or Should I take another process ?
I always thanks all of you for kind answer.
Choe,SeongHun
[email protected]
