radiant heater or quartz tube infrared heater for vacuum
Honggang Jiang
2003-10-10
Dear all:
I need to install a radiant heater inside the vacuum system to heat up the
substrate for e-beam evaporation. the vacuum is about 10E-6torr, and the
temperature of the substrate about 300oC. Could anybody provide some information
regarding who make the heaters, as well as the power supplies? Thanks a lot.
Best regards
Honggang Jiang, PhD
Materials Science Engineer
Second Sight
12744 San Fernando Road
Building 3
Sylmar, CA 91342
Ph: 818 833 5058
Fx: 818 833 5067
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