Dear Maryla,

We build megasonic single wafer cleaners. Please check our web page or
give me a call.

B. Kuyel, Ph.D.
Nano-Master Inc.
Nanomaster.com, 512 385 4552

-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of
maryla krolikowska
Sent: Monday, October 13, 2003 2:28 AM
To: General MEMS discussion
Subject: [mems-talk] Wafer cleaning

Hi
I need to recycle Si wafers with 2.5 micron  SiO2 layer   and wafers
with LPCVD SiN layer
I would appreciate any advice on a safe cleaning process  for both
SiO2 as well as for LPCVD SiN.

Thank you in advance
maryla
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