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908 464-6675 Bob Sherman


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Subject: Liquid carbon dioxid cleaning
From:    "Erik Jung"  at INTERNET
Date:    11/18/97  18:17

Dear MEMS readers,

since quite a time the liquid carbon dioxide is used for release of
minute structures. In the recent times, the cleaning potential of this
super fluid liquid was also discovered. Do you know a site, where such
an installation is that provides service and/or sample cleaning?
Best regards and thank you for your help,

--
Erik Jung
FhG-IZM
Gustav-Meyer-Allee 25
D-13355 Berlin
Germany
Phone: +49-30-46403-230
Fax: +49-30-46403-161
email: [email protected]