hello,members:
    I want to fabricated a SiO2 probe on cantilevel.On the tip of the
probe, I want to make a 100nm dia
meter aperture on the tip of the probe.Can anyone give me some advise.
    By the way, I use silicon oxidation to form the probe,can someone give
someone give some paper
about the principle of oxidation process,especially in the concave region.