Do not know about SU8 specifically.  With normal positive resists if you use
image reversal or silylation think very high temperatures with no distortion.
One colleague used reversal and flowed TEOS at 405 without distortion.
Silylation should give even higher temperature resistance theoretically.  I do
not have any data to confirm this.  Bill Moffat

-----Original Message-----
From: LSWANG [mailto:[email protected]]
Sent: Wednesday, October 15, 2003 5:43 PM
To: [email protected]
Subject: [mems-talk] surviving temperature of crosslinked SU-8


Hi,
Does anyone have some idea about what is the highest
temperature crosslinked SU-8 structure can stand with
losing the feature resolution. 300C or higher?
thanks
Lisen

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