Lisen:

My experience with a sample with submicrometer features, heated in a
non-oxidizing (argon) atmosphere:
- 300 C, no problem
- 350 C, a few hours
- 400 C, a few minutes

Heated in a mass spectrometer (high vacuum) in field-ionization mode:
- small amounts of uncrosslinked monomers (equivalent to an "SU-2")
come off at ~300 C
- major structural degradation at ~450 C

Hope this is helpful.

Chris

On Thursday, October 16, 2003, at 01:42  am, LSWANG wrote:

> Hi,
> Does anyone have some idea about what is the highest
> temperature crosslinked SU-8 structure can stand with
> losing the feature resolution. 300C or higher?
> thanks
> Lisen

--
Christopher F. Blanford
Inorganic Chemistry Laboratory, South Parks Road, Oxford, OX1 3QR, UK
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