I baked cross-linked SU8 to 400 degrees for 20mins.
It turned dark brown, and the center sagged. The structure turned out to
be a little less robust.
It can shatter if you scratch VERY hard with a tweezers.
The CD at the bottom didn't change, but the profile tapered to about 105
degrees.
Hope this helps.
ShuTing
ShuTing Hsu
Graduate Student Researcher
Integrated Photonics Laboratory
UCLA EE Department
420 Westwood Plaza, 63-128 Eng 4
Los Angeles, CA 90095
Tel: (310) 825-7338
Fax: (310) 794-5513
Email: [email protected]
--
---Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of
Bill Moffat
Sent: Thursday, October 16, 2003 8:13 AM
To: General MEMS discussion
Subject: RE: [mems-talk] surviving temperature of crosslinked SU-8
Do not know about SU8 specifically. With normal positive resists if you
use image reversal or silylation think very high temperatures with no
distortion. One colleague used reversal and flowed TEOS at 405 without
distortion. Silylation should give even higher temperature resistance
theoretically. I do not have any data to confirm this. Bill Moffat
-----Original Message-----
From: LSWANG [mailto:[email protected]]
Sent: Wednesday, October 15, 2003 5:43 PM
To: [email protected]
Subject: [mems-talk] surviving temperature of crosslinked SU-8
Hi,
Does anyone have some idea about what is the highest temperature
crosslinked SU-8 structure can stand with losing the feature resolution.
300C or higher? thanks Lisen
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