Hi all!
I would like to ask you about the recipe of Ti etchant.  We are going to
etch a <50 nm thick Ti layer on epitaxial barium titanate.  Since this
material must be unfamiliar with you, you don't forget about it.  I just
want to know what kinds of etchant you usually fix for Ti etching.

Thanks a lot in advance.

T. Sophie Hamano