Sophie,

Try 50:1 H2O2:NH4OH at room temperature....to etch Ti

it works well

Kris


--- "t. hamano"  wrote:
> Hi all!
> I would like to ask you about the recipe of Ti
> etchant.  We are going to
> etch a <50 nm thick Ti layer on epitaxial barium
> titanate.  Since this
> material must be unfamiliar with you, you don't
> forget about it.  I just
> want to know what kinds of etchant you usually fix
> for Ti etching.
>
> Thanks a lot in advance.
>
> T. Sophie Hamano
>
>
>
>
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