October 20, 2003

Dear MEMS community -

We are interested in developing metrology and calibration standards for
MEMS microstructures.  I am interested in coordinating this effort with
Professor Christopher L. Muhlstein of Pennsylvania State University.  I
have already spoken with him regarding this small project.   There are
several microstructures on a single chips with various dimensions.

I have a total of 10 chips with microstructures.  5 chips are coated with
diamond like carbon (DLC) coating and other 5 chips are with bare silicon
microstructures.  I am looking for testing and characterization
partners.  No funds are exchanged during this process.  Each partner will
characterize one chip with DLC coated microstructures and 1 chip with bare
silicon microstructures for comparison purposes.  A test report will be
prepared with all the test results.

More details on the test matrix will be provided to the agreed partners at
a later stage.  Please help me in putting together nice consortium.

Thank you,
Ram

Dr. Rajeshuni Ramesham "Ram"
Jet Propulsion Laboratory, M/S 125-152
California Institute of Technology
4800 Oak Grove Drive
Pasadena, CA 91109
Tel.: 818 354 7190
Fax: 818 393 4382 or 5245
e-Mail: [email protected]