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MEMSnet Home: MEMS-Talk: low temperature anodic bonding
low temperature anodic bonding
2003-10-21
ERIC SIMONE
2003-10-23
taya sunil
PMMA as microcantilever material
2003-10-23
Samir Kagadkar
2003-10-21
Tomblin, Graham (OH32)
low temperature anodic bonding
ERIC SIMONE
2003-10-21
I was wondering if anyone has a good recipe for low temperature anodic bonding,
where by low I mean no higher than 200 or 250C. I'm trying to bond a microscope
cover glass to a Si wafer but do not want to heat up too high, since the thermal
coefficient is different for this glass, compared to the Si (thus when they cool
there will be cracking) Thanks much.


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