Dear Graham,

Thanks a lot for your mail and help. I already noticed, that it is
very difficult to get gauge pressure chips from companies in general
(without pyrex glas). So I will try the first approach as recommended
in your mail.

Best,
Joel


>Joel
>You may be able to dice off the pyrex using a diamond saw or perhaps
>drilling a hole using ultrasonic milling or
>sanblasting with a fine nozzle.
>Either way you have to be careful not to damage the sensor chip.
>Alternatively find someone who will give you a a gage prssure chip,
>try silicon micro structures in milpitas California
>Graham
>
>-----Original Message-----
>From: Schlienger, Joel P. [mailto:[email protected]]
>Sent: Friday, October 17, 2003 2:45 PM
>To: [email protected]
>Subject: [mems-talk] How to separate a silicon chip from a pyrex glas
>
>
>Does anybody has the experience on how to separate a pressure
>silicon chip from the pyrex support glas. I have a chip
>that is mounted by anodic bonding on the pyrex but need to remove it
>in order to use the pressor sensor in gauge
>conditions.
>
>Thanks for any comments on that.
>
>Joel
>
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--
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Joel Schlienger, Research Scientist
Turbomachinery Laboratory  ETH Zurich
Sonneggstrasse 3, CH-8092 Zurich
Tel.: +41-1-632 63 43, Fax: +41-1-632 11 00
E-Mail: mailto:[email protected]
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