Sidorov,

I would encourage you to go to the MEMS Exchange
web site.  We have over 40 foundries in our
network, many of which can deposit low-stress
LSN on a variety of size substrates and stress
levels.

You can find the info at:

https://www.mems-exchange.org/

Let me know if you have any questions.


-Michael

****************************************************
Dr. Michael A. Huff
Director of the MEMS Exchange
Corporation for National Research Initiatives
1895 Preston White Drive
Reston, Virginia  20191

Tel:            703-262-5318

Visit us at:    http://www.mems-exchange.org










>Hello,
>
>  I'm looking for a vendors that can deposit >5000A um low stress nitride for
>membranes fabrication. Thanks in advance for your information.
>
>Sidorov Elena, BlueBird Optical MEMS
>
>
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