The UC Berkeley Microlab provides this film through MEMS Exchange.
See: http://www.mems-exchange.org/catalog/
or contact me directly if you need additional information.
Thank you.
Bill Flounders
Microlab Technology Manager


  can provide this film.
Please contact me

Elena Sidorov -BlueBird wrote:
> Hello,
>
>  I’m looking for a vendors that can deposit >5000A um low stress nitride for
> membranes fabrication. Thanks in advance for your information.
>
> Sidorov Elena, BlueBird Optical MEMS
>
>
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