Etch rate of glass with RIE is highly dependent on power. I've seen
reasonable results with ~500watts, 90% CF4/O2 or even CHF3/O2, at low
pressures of ~ 10mT.

Mubeen Almoustafa
Process Engineer
Trion Technology

-----Original Message-----
From: [email protected]
[mailto:[email protected]]On Behalf Of
[email protected]
Sent: Tuesday, October 21, 2003 2:46 AM
To: [email protected]
Subject: [mems-talk] glass RIE etching
Importance: High

Can anyone send me some parameters and/or particular description of glass
RIE etching?


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