Eric
I haven't seen a low temperature anodic bond, generally the mismatch problem is
"minimized " be selecting a glass
closely matched with silicon, there are a number around, any good glass plate
supplier should be able to help.
Alternatively you may be able to use a low temperature glass frit.
Graham

-----Original Message-----
From: ERIC SIMONE [mailto:[email protected]]
Sent: Monday, October 20, 2003 9:20 PM
To: [email protected]
Subject: [mems-talk] low temperature anodic bonding


I was wondering if anyone has a good recipe for low temperature anodic bonding,
where by low I mean no higher than 200
or 250C. I'm trying to bond a microscope cover glass to a Si wafer but do not
want to heat up too high, since the
thermal coefficient is different for this glass, compared to the Si (thus when
they cool there will be cracking) Thanks
much.


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