Sidorov,

We can deposit both LPCVD (up to 4" wafers) and PECVD (up to 8" wafers) low
stress nitride.  Please let me know the specifics of your process i.e.
thickness uniformity, thickness target, number of wafers, and I will be
happy to send you a quotation.

Eric Miller
Manger of Program Operations
WTC Microfab Lab
206 616-3855
[email protected]  http://microfab.watechcenter.org

----- Original Message -----
From: "Elena Sidorov -BlueBird" 
To: 
Sent: Tuesday, October 21, 2003 2:10 AM
Subject: [mems-talk] Low stress silicon nitride.


>
> Hello,
>
>  I’m looking for a vendors that can deposit >5000A um low stress nitride
for
> membranes fabrication. Thanks in advance for your information.
>
> Sidorov Elena, BlueBird Optical MEMS
>
>
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