Does this selectively etch TiO2 films grown on substrates
like Silicon and SrTiO3 or does it etch them too?
greetings,
Rajesh
----- Original Message -----
From: "kris"
To: "General MEMS discussion"
Sent: Friday, October 24, 2003 5:38 PM
Subject: Re: [mems-talk] thin film TiO2 etchant
> try 1: 50 NH4OH:H2O2
>
>>