Bob,
there is an old but thourough article on microchannel fabrication in glass
from Jed Harrison in Analytical Chemistry: Z. H. Fan; D. J. Harrison,
"Micromachining of capillary electrophoresis injectors and separators on
glass chips and evaluation of flow at capillary intersections", Analytical
Chemistry, 66, 1994, 177-184. You can also have a look at various review
article on microfluidics like H. Becker, A. Manz, Integrated Capillary
Electrophoresis for Chemical Analysis, in: H.Baltes, W.Göpel, J.Hesse (Eds),
Sensors Update, Vol. 3, VCH Weinheim 1998, 208-238.
, M.U.Kopp, H.J.Crabtree, A.Manz, Current Opinion in Chem. Biol. 1 (1997),
410-419 or recent books like A. Manz, H. Becker (Eds.): Microsystem
Technology in Chemistry and Life Sciences. Topics in Current Chemistry 194,
Springer, Heidelberg, 1998, J.Cheng, L. J. Kricka (Eds.): Biochip
Technology, Harwood Academic publishers, Philadelphia, 2002
Hope this helps
Holger
--
Dr. Holger Becker
IIP-Technologies GmbH
Niebuhrstrasse 1a
D-53113 Bonn
Tel: +49 (0) 228 969 550
Fax: +49 (0) 228 969 5522
www.iip-tec.com
-----Ursprüngliche Nachricht-----
Von: Robert Smith [mailto:[email protected]]
Gesendet: Freitag, 24. Oktober 2003 21:56
An: [email protected]
Betreff: [mems-talk] Glass wafers
Dear All,
Which glass material (quartz, BSG, etc) is best
suitable for fabrication of microchannels. I see many
different qualities of wafer.
If there is a review article on this subject, let me
know. Sorry for a naive question. I would appreciate
your help.
Thanks,
Bob
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