Try "fundamentals of microfabrication" by Marc Madou
ISBN 0-8493-9451-1

Jobert van Eisden

SUNY Albany


-----Original Message-----
From: Celine Campillo
To: [email protected]
Sent: 10/29/2003 10:08 AM
Subject: [mems-talk] process bible

Hi all,

May anyone give us the reference of a very good book
on MEMS micro-machining, especially on process and
technology.

Thanks in advance,
Cel.

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