Madou, " Fundamentals of Microfabrication", Elwenspoek " Silicon Micromachining"

-----Original Message-----
From: Celine Campillo [mailto:[email protected]]
Sent: Wednesday, October 29, 2003 5:08 PM
To: [email protected]
Subject: [mems-talk] process bible


Hi all,

May anyone give us the reference of a very good book
on MEMS micro-machining, especially on process and
technology.

Thanks in advance,
Cel.

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