You can use stroboscopic interferometry to measure the deformation, and
then you don't have to coat your samples-

If you have any questions, please give me a call.


Regards-

Trisha


Patricia Browne
Product Manager - MEMS Test & Characterization Tools
Veeco Metrology
2650 E Elvira Rd
Tucson, AZ 85706
P: 520-741-1044X1091
[email protected]


-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of
ramji dhakal
Sent: Wednesday, October 29, 2003 1:32 PM
To: General MEMS discussion
Subject: [mems-talk] Sputtering/spraying for Photogrammetry

Hi MEMS workers,

I want to measure the deformation of some MEMS scale
or a bit larger structures by Photogrammetry. I need
to have a good distribution of grey areas and white
areas in the images. For this, I have to spray some
tiny dot particles. I need a sprayer of that capacity.
Also, an appropriate spray material would be required.
I tried to use some powders like Titanium oxide and
some other commercially available things but they do
not seem to work for that level. Could anyone suggest
me a way out?

Is it possible to sputter something? It should not
make a continuous deposit, what I need is a contrast
between the different points..

Thanks in advance for your help..
Ramji

=====
Ramji Dhakal

M S Mechanical Engineering,
SUNY Binghamton, NY

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