It shouldn't.  I've used a Chrome/gold metal layer as an oxide etch mask in
the past.

David Nemeth
Senior Engineer
Sophia Wireless, Inc.
14225-C Sullyfield Circle
Chantilly, VA
Ph: (703) 961-9573 x206
Fax:(703) 961-9576

-----Original Message-----
From: [email protected]
[mailto:[email protected]]On
Behalf Of Yilei Zhang
Sent: Sunday, November 02, 2003 6:42 PM
To: [email protected]
Subject: [mems-talk] will HF damage Chrome layer?


Hi all:
Can anyone tell me whether chrome layer can survive in HF etching sio2? if
not, is there any other SiO2 etchant will not damage Chrome? thanks.

Regards,
Yilei Zhang










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