Fluorine etchants like CF4  will not damage Al or Cr. You might see some
erosion on the metal but that is mostly due to power & pressure parameters
rather than the gas.

Mubeen Almoustafa
Process Engineer
Trion Technology

-----Original Message-----
From: Yilei Zhang [mailto:[email protected]]
Sent: Friday, October 31, 2003 10:23 AM
To: [email protected]
Subject: [mems-talk] sio2 etchant

Hi all,
Is there any sio2 etchant that will not damage metal mask, for example,
chrome
or Al? thanks.


Regards,
Yilei Zhang