Hello, and thank you all for replying!

I am currently trying to mix C4F8 with SF6 using Thermal oxide as a
hardmask: initial results are promising, but no definite conclusion yet.
Shu, I am using a plasmatherm tool (Versalock Unaxis)
I'll let you guys know if I have some good results.

Thanks again,

Jobert van Eisden

SUNY Albany