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MEMSnet Home: MEMS-Talk: how to avoid undercutting?
how to avoid undercutting?
2003-11-04
Yilei Zhang
2003-11-05
[email protected]
2003-11-05
Shay Kaplan
how to avoid undercutting?
[email protected]
2003-11-05
Hello Yilei,

Etching Si with KOH-soloution is anisotroppic. The etchrate of (111)-planes is
practically zero. Therefore structures aligned parallel or perpendicular to the
<110>-flat will have no undercut. The only exception to this is a convex corner.
Kind regards

      Ingo



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