Hi!
Just a question: is your chrome under the SiO2 layer?
Because in this case there is a problem in wet etching of SiO2:
we found that opening via-holes through SiO2 to contact
underlying chrome lines, using
BHF (HF(40%):NH4F(40%):H2O = 1:6:10) at room temperature,
chrome turned into a very hard layer with no electrical conduction.
Now we use CF4/O2 plasma etching for vias through SiO2.

Ing. Paolo Tassini
Centro Ricerche ENEA
Via Vecchio Macello, s.n.c.
80055    Portici    (NA)
tel. 081 7723289
fax 081 7723344
e-mail [email protected]


----- Original Message -----
From: "Yilei Zhang" 
To: 
Sent: Monday, November 03, 2003 12:42 AM
Subject: [mems-talk] will HF damage Chrome layer?

> Hi all:
> Can anyone tell me whether chrome layer can survive in HF etching sio2? if
> not, is there any other SiO2 etchant will not damage Chrome? thanks.
>
> Regards,
> Yilei Zhang