Chen-Han,

There are a couple of places that come to mind.

CWRU and UCB have been both involved in developing thin-film
3-C LPCVD SiC deposition processes as well as the ability to
dry etch these films.  Chris Zorman at CWRU is a good contact
and Roger Howe at UCB.

I think Kulite semiconductor based in New Jersey has been
working for several years on wet etching, including
electrochemical etching techniques, for bulk SiC as
well.

Hope that helps,

-Michael



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>Hi everyone,
>
>I am releatively new to this area, so hope that you don't find my question
>silly.
>I would like to know the typical processes or chemicals I need for silicon
>carbide(SiC) etching.
>
>thanks very much in advance.
>
>
>
>///////////////////////////////////
>Chen-Han Lee
>Research Student
>School of Manufacturing and Mechanical Engineering,
>University of Birmingham,
>Birmingham, B15 2TT
>United Kingdom,
>Phone :  +44 121 4144245
>Fax :    +44 121 4143958
>E-Mail : [email protected]
>///////////////////////////////////
>
>
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