Ebin,

In terms of other high aspect ratio materials (besides SU-8, which was mentioned
in a previous response) there are also a couple of other materials, such as JSR
THB-430N (negative resist) and AZ 9260 (positive tone resist).  Critical in
achieving the high aspect ratios is the use of a highly collimated exposure
source, and a high transparency material (such as the two mentioned before).


Best Regards,

Chad Brubaker

EV Group       invent * innovate * implement
Technology - Tel: (602) 437-9492, Fax: (602)437-9435 e-mail:
[email protected], www.EVGroup.com

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 -----Original Message-----
From:   [email protected] [mailto:mems-talk-
[email protected]]  On Behalf Of Ebin Liao
Sent:   Wednesday, November 05, 2003 12:12 AM
To:     [email protected]
Subject:        [mems-talk] mold material for high aspect-of-ratio patterns

Dear colleagues,

Currently I'm thinking to make a mold for some high
aspect-of-ratio columns (about 20 micron high with
diameter of 5 micron). Originally I want to use some
dry-etch BCB, but unfortunately find it very expensive
(US $3250 for 0.9 Kg). Anyone can suggest some
alternatives? Thanks a lot.

Best regards,

Ebin

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