A
MEMS Clearinghouse
®
and information portal
for the MEMS and Nanotechnology community
Register
Sign-In
MEMSnet Home
About Us
What is MEMS?
Beginner's Guide
Discussion Groups
Advertise Here
News
MEMSnet Home
:
MEMS-Talk
:
RIE etch for glas
RIE etch for glas
2003-11-06
PAtrick Carlberg
wet etchant for Sn and Sn oxide
2003-11-06
Robert Dean
2003-11-07
rakesh babu
2003-11-07
Mighty Platypus
2003-11-07
David Nemeth
RIE etch for glas
PAtrick Carlberg
2003-11-06
Dear all Does anyone have a recipe for RIE on glass, with an etch rate about 100nm/min? Patrick
reply
Events
Glossary
Materials
Links
MEMS-talk