Hi Nancy,
We are almost finished with our foundry construction and beginning our
process equipment installs and characterizations.  I am the process
engineering manager at Trion.  In my past experience at Motorola I have
processed many surface acoustic wave devices, and some Ti indifused
waveguides on LiNbO3.  At Sandia National Labs I processed some
integrated optical components, but the last 7 years I have been
processing III-V materials for VCSELs.  Right now our fab is relatively
open to new projects.

Trion is a plasma equipment manufacturer for wafer fabrication, but is
also opening a foundry service.  One great advantage we have on the
foundry side is the flexibility of process capability as we can actual
configure equipment for best results on specific processes. I know low
voltage phase modulators fabricated with LiNbO3 z-cut y-prop depend on
smooth- relatively deeper dry etchs in the material and that etching the
material is difficult.  I believe we might be able to accomplish quality
processing in this area. What type of devices were you needing
fabricated?- Best Regards, John

John Joseph
Process Engineering Manager
Trion Technologies
Tempe AZ 85281
480 968-8818 x24
cell 480 415-0838




-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of
Nancy Lahoud
Sent: Wednesday, November 05, 2003 12:55 PM
To: [email protected]
Subject: [mems-talk] Looking for a lithium niobate foundry

Hello,

I am looking for a foundry with experience in processing z-cut lithium
niobate. If anyone has any suggestions I would really appreciate it.

Best regards,

Nancy.


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