> Does anyone know the etchant for Silicon Carbide(SiC) wet etching?
> thanks
> Chen-Han Lee

See the The MEMS Handbook, Chapter 20, "Fabrication and Characterization of
Single-Crystal Silicon Carbide MEMS"
by Robert Okojie.
See also Proc. IEEE, vol 86, no. 8, Aug. 1998, pp. 1594-1610,
"Silicon Carbide MEMS for Harsh Environment" by Mehran Mehregany et al.

SiC is very inert and there is no easy way to wet etch it.
Wet etching has been done using electrochemical etching and also
photochemical etching.
SiC can, however, be plasma etched in fluorine-based chemistries (SF6,
CF4+O2, etc.).

    --Kirt Williams, Ph.D.  consultant