Ask the company Allresist in Germany (on the web).
Regards,
C. Gorecki

*****************************************
Dr. Christophe Gorecki
CNRS Senior Researcher
Laboratoire d'Optique P.M. Duffieux, Faculte des Sciences et Techniques
16 route de Gray, 25030 Besancon, France
Tel: +33-3-81666607/33-6-84653420
Fax: +33-3-81666423
e-mail: [email protected]


-----Message d'origine-----
De : [email protected]
[mailto:[email protected]]
De la part de KANISHKA BISWAS
Envoye : vendredi 7 novembre 2003 07:43
A : [email protected]
Objet : [mems-talk] Protective Coating in KOH solution!!!!

Hi Everybody,
              Can any one suggest a protective coating (polymer etc)for
protecting the top surface of silicon wafer with aluminium lines while
etching the back side of the wafer using KOH solution???? We have
already tried out wax, black wax coatings but it did not work.
Any help and references in this regard will be highly appreciated....
Thanks
Kanishka


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