It should be added that Hydrobromic acid is pretty nasty stuff - talk to
your facilities people before you even order it.

David Nemeth
Senior Engineer
Sophia Wireless, Inc.
14225-C Sullyfield Circle
Chantilly, VA
Ph: (703) 961-9573 x206
Fax:(703) 961-9576

-----Original Message-----
From: [email protected]
[mailto:[email protected]]On
Behalf Of rakesh babu
Sent: Thursday, November 06, 2003 10:07 PM
To: General MEMS discussion
Subject: Re: [mems-talk] wet etchant for Sn and Sn oxide


dear sir,

 Tin and Tin oxide are difficult to etch using wet etchant and the only wet
etchant found to etch it is Hydrobromic acid.

best regards
Rakesh
Graduate Research Assistant
ECE  Department
Wayne state University

Robert Dean  wrote:
Hello,

Can someone recommend a wet etchant for Sn and Sn oxide that does not etch
Si, Ni or Ti?

Thanks!

Sincerely,

Robert Dean

Research Associate IV
Center for Advanced Vehicle Electronics
Auburn University
200 Broun Hall
Auburn, AL 36849

Voice: 334-844-1838
Fax: 334-844-1898
Email: [email protected]
Web: http://www.eng.auburn.edu/~deanron


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