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MEMSnet Home: MEMS-Talk: Magentic stir in KOH etching
Magentic stir in KOH etching
2003-11-07
Liwei Wang
2003-11-08
Eric Miller
2003-11-09
Shay Kaplan
2003-11-10
Ertl, Stephan
Magentic stir in KOH etching
Liwei Wang
2003-11-07
Dear all:

I am setting up a KOH etching station right now for deep etching Si
(etch through the 500um wafer).I plan to have a constant temperature
bath, a beaker, and a nice wafer holder to protect the backside of the
film. my concern will be that do I need to have a magnetic stir set up
in this KOH etching system? because it will be at least 10 hours
etching, if so, how I gonna make it work? Put a magnetic plate in the
water bath? or underneath the whole bath? does anyone have any
experience or suggestions?

Thank you so much in advance.
Wish everybody have a nice weekend.

Ivy

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