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MEMSnet Home: MEMS-Talk: Magentic stir in KOH etching
Magentic stir in KOH etching
2003-11-07
Liwei Wang
2003-11-08
Eric Miller
2003-11-09
Shay Kaplan
2003-11-10
Ertl, Stephan
Magentic stir in KOH etching
Shay Kaplan
2003-11-09
hi Ivy,
You can set the magnet bar below the water tank. You can also try to either
circulate the KOH using a pump or to mix by bubling nitrogen thru the
solution. Keep an eye on the thickness of the beaker walls - it's going to
thin down in few months.
Shay

Liwei Wang wrote:

> Dear all:
>
> I am setting up a KOH etching station right now for deep etching Si
> (etch through the 500um wafer).I plan to have a constant temperature
> bath, a beaker, and a nice wafer holder to protect the backside of the
> film. my concern will be that do I need to have a magnetic stir set up
> in this KOH etching system? because it will be at least 10 hours
> etching, if so, how I gonna make it work? Put a magnetic plate in the
> water bath? or underneath the whole bath? does anyone have any
> experience or suggestions?
>
> Thank you so much in advance.
> Wish everybody have a nice weekend.
>
> Ivy
>
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