A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Services for Rapid Thermal Anneal
Services for Rapid Thermal Anneal
2003-11-11
[email protected]
2003-11-12
Bill Flounders
2003-11-12
Dunham, Glen
Services for Rapid Thermal Anneal
[email protected]
2003-11-11
I need to send out 100 mm wafers for either a rapid thermal anneal @ 1100 C in
N2 for 10 minutes, or a longer anneal @ 800 C.   I have been having trouble
finding a vendor whose equipment is running, and who will accept the wafers
after they have been exposed to metal.  Does anybody know of any commercial
services out there ?

Michael

reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
The Branford Group
Addison Engineering
Mentor Graphics Corporation
MEMS Technology Review