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MEMSnet Home: MEMS-Talk: Frequently used materials in MEMS
Frequently used materials in MEMS
2003-11-12
Yilei Zhang
2003-11-13
mahdi bagheri
Frequently used materials in MEMS
Yilei Zhang
2003-11-12
Hi all:
Can anyone recommend some frequently used materials (metals) in MEMS, for
example, Si,polysilicon, etc.? What materials are commom for LIGA progress?
thanks.


Regards,
Yilei Zhang










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