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MEMSnet Home: MEMS-Talk: E-beam evaporator needed
E-beam evaporator needed
2003-11-11
Michael D Martin
2003-11-12
R. Brent Garber (2 parts)
E-beam evaporator needed
R. Brent Garber
2003-11-12
Hey Mike,

I just bought a good used e-gun system from Vessco in Boxford, MA.
Ask for Dennis @ 978-887-5305

Brent

Michael D Martin wrote:

> Hi,
>    Can you guys supply a recomendation for an e-beam evaporator. We
> would like a research grade system that handles multiple 4" wafers and
> has at least 2 targets with a uniformity of at most 10% over 100 mm.
>
> Thanks in advance...
>    Mike
>    U of Louisville
>
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