Hello,
I have heard of people using Shipley BPR100 for this application, although I
myself, have not.  You may contact Bob Forman at [email protected] for more
information.

Neal Ricks
Wafer Fab Manager
Shipley Co., LLC
EIF Division

KANISHKA BISWAS  wrote:
Hi Everybody,
Can any one suggest a protective coating (polymer etc)for protecting the top
surface of silicon wafer with aluminium lines while etching the back side of the
wafer using KOH solution???? We have already tried out wax, black wax coatings
but it did not work.
Any help and references in this regard will be highly appreciated....
Thanks
Kanishka


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