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MEMSnet Home: MEMS-Talk: Protecting Aluminium Bond Pads from Corrosion
Protecting Aluminium Bond Pads from Corrosion
2003-11-12
[email protected]
2003-11-13
Kirt & Erika Zipf-Williams
2003-11-14
Charles Ellis
2003-11-14
M. Mubeen Almoustafa
Protecting Aluminium Bond Pads from Corrosion
[email protected]
2003-11-12



Guys,
      Any advise on this subject.  The Aluminium Pad size is approximately
500um X 500um and the leads are protected by the Passivation Layer.  I
experience Corrosion problem only on the Bond Pads.  Bond Pads are opened
using RIE etch process.
Thanks,

Sanjay Thekdi
375 Los Coches Street,
Milpitas, CA 95035



reply
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