Hi Yilei
I have read some articles and books about LIGA and I`ve found that these
materials are usefull;
Austenite steel, Si wafer+ thin Ti, Si wafer + Ag/Cr(top layer), Cu plated with
Gold, Ti, Ni for primary substrate.
PMMA, PMI, PLG, PAS, POM for resist;
Si, SiNx, SiC, Diamond, BN, Be, Ti for X-Ray Masks;
Au, Cr, NI, FeNi, Pt, Ag, NiCo ... for electroplating.
this book is a helpful reference for you: Fundamentals of Microfabrication by
Marc Madou.
Regards

Mahdi Bagheri
Mechanical Engineer
UM Microelectronc Lab.

Yilei Zhang  wrote:
Hi all:
Can anyone recommend some frequently used materials (metals) in MEMS, for
example, Si,polysilicon, etc.? What materials are commom for LIGA progress?
thanks.


Regards,
Yilei Zhang










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