There is a company called silicet AG in Germany which sell handling tools for
front side wafer protecting in KOH. See www.silicet.de
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Dr.H.Kretschmer
S
Dept. CT MM 5
Corporate Technology, Micromechanics and Coating Technologies
Zentralabteilung Technik, Mikromechanik und Oberflächentechnik
D-13629 Berlin
Phone: +49 30 386 24681
Fax: +49 30 386 25764
email: mailto: [email protected]
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