Hello Harry,
I have looked at this for a long time and could never find data to support
difference in TCE for the different orinetiations. Manufacturers I asked said
either that there is no difference or that they don't know.
Shay

D H Grantham wrote:

> Hi, Ken:  If you've not already gotten an answer to your question regarding
coefficient of expansion, I can tell you that there is a difference.  {111}
shows isotropic behavior in the plane of the wafer, as I recall.  I don't have
the numbers off the top of my head but can tell you that there are handbook
answers regarding these and and similar properties.  I do not recall that
resistivity makes a big difference.
>
> harry grantham
> _______________________________________________
> [email protected] mailing list: to unsubscribe or change your list
> options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk
> Hosted by the MEMS Exchange, providers of MEMS processing services.
> Visit us at http://www.memsnet.org/