Depending on the need for post etch removal, there are a couple of
dielectric PECVD films ie. Si3N4 and (a)SiC  that will hold up to your wet
etch process

P.S. I can deposit both of these films if you need them.

Best regards,

Glenn Silveira


EIF Division

KANISHKA BISWAS  wrote:
Hi Everybody,
Can any one suggest a protective coating (polymer etc)for protecting the top
surface of silicon wafer with aluminium lines while etching the back side of
the wafer using KOH solution???? We have already tried out wax, black wax
coatings but it did not work.
Any help and references in this regard will be highly appreciated....
Thanks
Kanishka


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