A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Dry Film Resist
Dry Film Resist
2003-11-19
Marcel de Haas
Dry Film Resist
Marcel de Haas
2003-11-19
Hello,

I am trying to create a microstructure on a polyimide foil with Dry Film Resist.
I am
using Sunfort AQ-5038 DFR from Asahi Kasei, and a 1,0 wt% sodium carbonate
solution as a developer.
The adhesion of the resist seems to be good after the exposure.
My problem is that after developing (puddling), the whole structure slides of
the
substrate during a rinse with DI-water. Developing takes also a lot of time ( 3
- 4
minutes). I also tried it on a copper surface, but had the same problems here.

I hope someone can give me advice.

Regards,

M. de Haas
-----------------------------------------------------------------------
ing. M. de Haas
Trainee Kennis-Instituut

Hogeschool van Utrecht
Oudenoord  700
3513  EX  UTRECHT
The Netherlands

tel: +31 (0)30 2388560
fax: +31 (0)30 2319270
gsm: +31 (0)6 24895822


reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
MEMS Technology Review
University Wafer
Addison Engineering
Mentor Graphics Corporation