What we do for rinsing fragile wafers is place the wafer-holder in a beaker
filled with DI-water. By then setting a gentle water-stream to flow through
the beaker for a couple of minutes (a water-hose can be used), the wafer is
then gently rinsed. To be sure that the wafer is properly rinsed, the wafer
can ultimately be placed in another beaker with fresh DI-water.
Succes.

Jason

___________________________________________________________
Jason Viotty
Senior Process Engineer
C2V
http://www.c2v.nl
___________________________________________________________



-----Original Message-----
From: Yilei Zhang [mailto:[email protected]]
Sent: woensdag 19 november 2003 2:24
To: [email protected]
Subject: [mems-talk] how to rinse small structure?


Hello all:
Can I use DI water+N2 in a tank to rinse wafer with small structures? Will
it
damage the structure, for example, will the cantilevers break during the
rinse? thanks.


Regards,
Yilei Zhang










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